Japan, Jan. 28 -- APPLIED MATERIALS INC has got intellectual property rights for 'CHUCKING PROCESS AND SYSTEM FOR SUBSTRATE PROCESSING CHAMBER.' Other related details are as follows:

Application Number: JP,2024-209918

Category (FI): C23C16/44@B,H01L21/31@C,H01L21/68@R,H02N13/00@D,H10P14/60,101@C,H10P72/72

Stage: Grant (IP right document published.)

Filing Date: Dec. 3, 2024

Publication Date: April 10, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....