Japan, Oct. 30 -- ASML NETHERLANDS BV has got intellectual property rights for 'CHARGED PARTICLE ASSESSMENT TOOL, AND INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2024-093566
Category (FI): H01J37/28@B,H01J37/244,H01J37/10
Stage: Grant (IP right document published.)
Filing Date: June 10, 2024
Publication Date: Oct. 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....