Japan, Aug. 6 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'BURIED DIODE DESIGN WITH LONG LIFE AND EXTENDED TEMPERATURE RANGE FOR ELECTROSTATIC CHUCK WITH MULTIPLE HEATER ARRAYS.' Other related details are as follows:
Application Number: JP,2024-102464
Category (FI): H01L21/302,101@G,H01L21/68@R,H10P14/60,101@C,H05B3/28,H10P50/20,101@G,H10P72/72,H05B3/10@A,C23C16/46,H01L21/31@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 26, 2024
Publication Date: Oct. 24, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....