Japan, March 25 -- ASM IP HOLDING BV has got intellectual property rights for 'BASE MATERIAL PROCESSING APPARATUS AND METHOD FOR PROCESSING BASE MATERIAL.' Other related details are as follows:
Application Number: JP,2020-025251
Category (FI): H10P14/60,101@B,C23C16/56,C23C16/44@F,C23C16/02,H01L21/31@B,H01L21/205,H10P14/24
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 18, 2020
Publication Date: Aug. 31, 2020
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....