Japan, Oct. 30 -- APPLIED MATERIALS INC has got intellectual property rights for 'ATOMIC OXYGEN AND OZONE DEVICE FOR CLEANING AND SURFACE TREATMENT.' Other related details are as follows:
Application Number: JP,2023-140187
Category (FI): H01L21/316@A,H01L21/205,H01L21/304,645@D
Stage: Grant (IP right document published.)
Filing Date: Aug. 30, 2023
Publication Date: Nov. 24, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....