Japan, March 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'APPARATUS FOR PROCESSING SUBSTRATE AND METHOD FOR TRANSPORTING SUBSTRATE.' Other related details are as follows:
Application Number: JP,2024-222012
Category (FI): B25J5/00@Z,B65G49/07@Z,B65G54/02,H01L21/31@B,H01L21/68@A,H02P25/06,H10P14/60,101@B,H10P72/30@A
Stage: Grant (IP right document published.)
Filing Date: Dec. 18, 2024
Publication Date: March 21, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....