Japan, Aug. 26 -- ASM IP HOLDING BV has got intellectual property rights for 'APPARATUS AND METHOD TO PROCESS WAFER.' Other related details are as follows:
Application Number: JP,2020-134963
Category (FI): H10P72/30@A,H01L21/68@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 7, 2020
Publication Date: March 1, 2021
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....