Japan, Nov. 7 -- ASM IP HOLDING BV has got intellectual property rights for 'APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDUCTOR FILMS IN SINGLE PROCESSING CHAMBER.' Other related details are as follows:
Application Number: JP,2023-050955
Category (FI): H01L21/304,645@C,H01L21/302,105@B
Stage: Grant (IP right document published.)
Filing Date: March 28, 2023
Publication Date: June 20, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....