Japan, Nov. 12 -- GLOBALWAFERS JAPAN CO LTD has got intellectual property rights for 'APPARATUS AND METHOD FOR MANUFACTURING EPITAXIAL WAFER.' Other related details are as follows:
Application Number: JP,2023-023063
Category (FI): H10P14/24,C30B25/16,C23C16/52,H01L21/205
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 17, 2023
Publication Date: Aug. 29, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....