Japan, May 13 -- ASML NETHERLANDS BV has got intellectual property rights for 'APERTURE ASSEMBLY, BEAM MANIPULATOR UNIT, METHOD FOR OPERATING CHARGED PARTICLE BEAM, AND CHARGED PARTICLE PROJECTION DEVICE.' Other related details are as follows:
Application Number: JP,2024-139679
Category (FI): H01J37/28@B,H01J37/09@Z,H01J37/153@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 21, 2024
Publication Date: Dec. 24, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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