Japan, Jan. 28 -- CANON INC has got intellectual property rights for 'ANALYSIS METHOD.' Other related details are as follows:
Application Number: JP,2021-154714
Category (FI): G03F7/20,521,H01L21/00,H01L21/30,502@D,H10P76/00,600
Stage: Grant (IP right document published.)
Filing Date: Sept. 22, 2021
Publication Date: April 3, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....