Japan, Oct. 30 -- TES CO LTD has got intellectual property rights for 'AMORPHOUS CARBON FILM AND METHOD OF VAPOR DEPOSITION FOR THE SAME.' Other related details are as follows:
Application Number: JP,2024-065518
Category (FI): H01L21/314@A,H01L21/31@C,C23C16/26,C23C16/505
Stage: Grant (IP right document published.)
Filing Date: April 15, 2024
Publication Date: Oct. 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....