Japan Intellectual Property Rights: ALIGNMENT DEVICE, ALIGNMENT METHOD, FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Japan, May 21 -- CANON TOKKI CORP has got intellectual property rights for 'ALIGNMENT DEVICE, ALIGNMENT METHOD, FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE.' Other related details are as follows:

Application Number: JP,2021-150323

Category (FI): H10K59/65,H10P72/50@F,H10P72/50@K,H10P72/70,H10K50/00,C23C14/04@A,C23C14/50@F,H10K71/10,H01L21/68@K,H10K71/16,164,H10K71/16,166,H10K71/00,H10K71/16,H05B33/10,H05B33/14@A,H01L21/68@F,H10K50/10,H01L21/68@N,H10K59/00,H10K59/10

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 15, 2021

Publication Date: March 28, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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