Japan, June 25 -- SHENZHEN SHENGWEIXU TECH CO LTD has got intellectual property rights for 'AIR INTAKE DEVICE, THIN FILM DEPOSITION DEVICE, AND THIN FILM DEPOSITION METHOD.' Other related details are as follows:
Application Number: JP,2024-123151
Category (FI): C23C16/455,H01L21/205,H01L21/31@B,H10P14/24,H10P14/60,101@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 30, 2024
Publication Date: June 11, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....