MUMBAI, India, June 24 -- Intellectual Property India has published a patent application (202647069760 A) filed by Asml Netherlands B. V. on June 03, 2026, for Substrate Support, Substrate Support System And Method To Clamp A Substrate On A Substrate Support.
Inventors include Boshouwers, Augustinus, Hubert, Maria; Gijsbertsen, Arjan; Kramer, Gijs; De Groot, Antonius, Franciscus, Johannes; and Van Beuzekom, Aart, Adrianus.
The application for the patent was published on June 12, 2026, under issue no. 24/2026.
Abstract: A substrate support configured to support a substrate is provided, the substrate support comprises a main support body having a support surface and a flexible support element. The flexible support element comprises a first...