MUMBAI, India, June 24 -- Intellectual Property India has published a patent application (202617064737 A) filed by Tokyo Electron Limited on May 22, 2026, for Monitoring Method, Monitoring Device, And Computer Storage Medium.
Inventors include Akada, Hikaru; and Ogami, Takayuki.
The application for the patent was published on June 12, 2026, under issue no. 24/2026.
Abstract: A monitoring method for monitoring a cleanroom interior in which removable floor tiles are arranged on the floor, said method comprising a step for detecting, on the basis of three-dimensional data for the cleanroom interior generated from the results of a distance measurement using electromagnetic waves, an opening from which a floor tile has been removed, wherein s...