MUMBAI, India, June 24 -- Intellectual Property India has published a patent application (202647068332 A) filed by Entegris, Inc. on June 01, 2026, for Laser Ablation Applications For Electrostatic Chucks.
Inventors include Yener, Doruk; Rybczynski, Jakub; Parker, Isaac J.; Gunda, Nilesh; Yannetta, Christopher J.; Raina, Supil; and Venkatraman, Chandrasekaran.
The application for the patent was published on June 12, 2026, under issue no. 24/2026.
Abstract: Electrostatic chucks and methods for forming electrostatic chucks are provided. A method comprises obtaining a substrate comprising an etch resistant coating layer; ablating, with a laser, the etch resistant coating layer so as to remove at least a portion of the etch resistant coating...