Intellectual Property India Publishes Patent Application for Cyclic Processing Of A Silicon Nanostructure

MUMBAI, India, June 26 -- Intellectual Property India has published a patent application (202647072161 A) filed by Alixlabs Ab on June 10, 2026, for Cyclic Processing Of A Silicon Nanostructure.

Inventors include Suyatin, Dmitry; Sundqvist, Jonas; Muhammad, Asif; and Roozeboom, Freddy.

The application for the patent was published on June 19, 2026, under issue no. 25/2026.

Abstract: A method for processing a silicon nanostructure erecting from a support structure is presented. The silicon nanostructure having a main surface delimited by, in relation to the main surface, inclined surfaces. The method comprises subjecting the silicon nanostructure for a first cyclic process. Each cycle of the first cyclic process comprises: oxidizing the ma...