Intellectual Property India Publishes Patent Application for Charging Particle-Optical Device, Charged Particle-Optical Module, Method Of Projecting A Plurality Of Charged Particle Beams Towards A Sample

MUMBAI, India, July 24 -- Intellectual Property India has published a patent application (202647086072 A) filed by Asml Netherlands B. V. on July 14, 2026, for Charging Particle-Optical Device, Charged Particle-Optical Module, Method Of Projecting A Plurality Of Charged Particle Beams Towards A Sample.

Inventor includes Wieland, Marco, Jan-Jaco.

The application for the patent was published on July 17, 2026, under issue no. 29/2026.

Abstract: The disclosure relates to apparatus and methods for projecting a plurality of charged particle beams towards a sample, and particularly for projecting the beams with reduced aberrations. In one arrangement, a charged particle-optical device comprises a lens array configured to focus a plurality of be...