Intellectual Property India Publishes Patent Application for Charged Particle-Optical Module, Charged Particle-Optical Device, And A Method Of Using A Charged-Particle Apparatus

MUMBAI, India, July 24 -- Intellectual Property India has published a patent application (202647086023 A) filed by Asml Netherlands B. V. on July 14, 2026, for Charged Particle-Optical Module, Charged Particle-Optical Device, And A Method Of Using A Charged-Particle Apparatus.

Inventor includes Mangnus, Albertus, Victor, Gerardus.

The application for the patent was published on July 17, 2026, under issue no. 29/2026.

Abstract: A charged particle-optical module for generating a plurality of sub-beams 211-213 from a source beam 202 of electrons, the module for use in an charged particle-optical device for projecting a plurality of sub-beams 211-213 toward a sample. The charged particle module comprises: an electron source 201 comprising an...