MUMBAI, India, July 24 -- Intellectual Property India has published a patent application (202647086565 A) filed by Asml Netherlands B. V. on July 15, 2026, for Charged Particle-Optical Apparatus And Method Of Processing A Sample.
Inventors include Wieland, Marco, Jan-Jaco; Maassen, Martinus, Gerardus, Johannes, Maria; Slot, Erwin Number; and Tsiatmas, Anagnostis.
The application for the patent was published on July 17, 2026, under issue no. 29/2026.
Abstract: A charged particle-optical apparatus comprises: a charged particle-optical device configured to direct a beam grid of beams of charged particles toward a region of a sample surface of a sample; a sample support configured to support the sample; and a controller configured to control...