Intellectual Property India Publishes Patent Application for An Ai-Driven Autonomous Digital Twin System For Real-Time Semiconductor Equipment Monitoring, Fault Diagnosis And Predictive Maintenance

MUMBAI, India, Sept. 28 -- Intellectual Property India has published a patent application (202641112238 A) filed by Chennai Institute Of Technology on September 18, 2026, for An Ai-Driven Autonomous Digital Twin System For Real-Time Semiconductor Equipment Monitoring, Fault Diagnosis And Predictive Maintenance.

Inventors include Dr. S. Aathilakshmi; Mr. V. Prem Sangeeth; Mr. P. Ramesh Raja; Mr. K. Ashwin Kumar; and Mr. A. Dhamarai Kannan.

The application for the patent was published on September 25, 2026, under issue no. 39/2026.

Abstract: This patent application concerns an intelligent semiconductor equipment monitoring and predictive maintenance system utilizing edge computing, FPGA processing, artificial intelligence (AI), and digital...