Intellectual Property India Publishes Patent Application for Advanced Thermal Management System (atm) For Pedestal Temperature Control In High Power Pecvd Chamber

MUMBAI, India, Oct. 19 -- Intellectual Property India has published a patent application (202647119829 A) filed by Applied Materials, Inc. on October 07, 2026, for Advanced Thermal Management System (atm) For Pedestal Temperature Control In High Power Pecvd Chamber.

Inventors include Zhang, Yuxing; Kangude, Abhijit; Prasham, Suhas Babu; Zhu, Dan; Benjamin Raj, Daemian Raj; and Rocha, Juan C..

The application for the patent was published on October 16, 2026, under issue no. 42/2026.

Abstract: Embodiments of the disclosure provided herein includes systems and methods for high power semiconductor manufacturing. The system includes a processing chamber, a substrate support assembly disposed within the processing chamber, and an advanced ther...