MUMBAI, India, Sept. 28 -- Intellectual Property India has published a patent application (202511017960 A) filed by Chairman, Defence Research & Development Organisation Drdo; and Indian Institute Of Technology, Delhi on February 28, 2025, for A Laser Interference Lithography Apparatus.
Inventors include Joseph, Joby; Devinder, Shital; Dr. Joseph, Shereena; and Pandey, Saurabh.
The application for the patent was published on September 25, 2026, under issue no. 39/2026.
Abstract: The present disclosure relates to a laser interference lithography apparatus (100). The laser interference lithography apparatus (100) includes a laser beam source (102) adapted to generate a line laser beam (108) and a platform (126). The platform (126) includes...