INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "CAUSALITY-BASED FEATURE LEARNING FOR ON-TOOL PROCESS MONITORING AND TOOL CONTROL"

GENEVA, April 20 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, CA 95054) filed a patent application (PCT/US2025/043380) for "CAUSALITY-BASED FEATURE LEARNING FOR ON-TOOL PROCESS MONITORING AND TOOL CONTROL" on Aug 25, 2025. With publication no. WO/2026/080152, the details related to the patent application was published on Apr 16, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BHATIA, Sidharth (5209 Coast Road, Apt A.Santa Cruz, CA 95060)

Abstract: Embodiments described herein relate to a method that includes obtaining a set of spectral data and a set of critical dimension (CD)...