India, April 30 -- What Is Immersion Lithography?

In semiconductor manufacturing, immersion lithography creates smaller and more intricate features on wafers. It enhances the resolution and precision of the lithography process. Immersion lithography has been instrumental in pushing the boundaries of chip miniaturisation. It has enabled the creation of features below 45 nanometres (nm), which is crucial for modern high-performance processors.

How Does Immersion Lithography Work?

Immersion lithography achieves higher resolution by bending the rules of light a bit. Here's a breakdown of the key aspects:

Light & Resolution: In lithography, light transfers a pattern from a photomask onto a photoresist on the wafer. The minimum size of feat...